Dynamic testing of micromechanical structures under thermo-electro-mechanical influences

Measurement: Journal of the International Measurement Confederation

Volumn 40, Issue 6, 2007, Pages 563-574

  Rinaldi, Gino ^a   Packirisamy, Muthukumaran ^a   Stiharu, Ion ^a  

^a Gina Cody School of Engineering and Computer Science   (Canada)

Author keywords

AFM; Dynamic characterization; LDV; MEMS; Natural frequency

Indexed keywords

MECHANICAL CONTROL EQUIPMENT; MEMS; MICROFABRICATION; MICROSTRUCTURE; MICROSYSTEMS; NATURAL FREQUENCIES;

DYNAMIC CHARACTERIZATION; LDV; THERMO-ELECTRO-MECHANICAL INFLUENCES;

MICROMECHANICS;

EID: 34249709549     PISSN: 02632241     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.measurement.2006.10.014     Document Type: Article

References (41)

1. Liu R., Paden B., and Turner K. MEMS resonators that are robust to process-induced feature width variations. Journal of Microelectromechanical Systems 11 (2002) 505-511
2. Rinaldi G., Packirisamy M., and Stiharu I. An improved method for predicting microfabrication influence in atomic force microscopy performances. International Journal of Nanotechnology 1 (2004) 292-306
3. Yi T., and Kim C.-J. Measurement of mechanical properties for MEMS materials. Measurement Science and Technology 10 (1999) 706-716
4. G. Rinaldi, M. Packirisamy, I. Stiharu, Experimental investigation on the dynamics of MEMS structures, in: Proceedings of SPIE, International Conference on MEMS, MOEMS and Micromachining, Strasbourg, France, April 2004.
5. Srikar V.T., and Spearing S.M. A critical review of microscale mechanical testing methods used in the design of microelectromechanical systems. Experimental Mechanics 43 (2003) 238-247
6. Srikar V.T., and Spearing S.M. Mechanical test methods for MEMS devices. Experimental Mechanics 43 (2003) 228-237
7. Sharpe W.N., Yuan B., and Edwards R.L. A new technique for measuring the mechanical properties of thin films. Journal of Micromechanical Systems 6 (1997) 193-199
8. Tsuchiya T., Tabata O., Sakata J., and Taga Y. Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films. Journal of Micromechanical Systems 7 (1998) 106-113
9. Yi T., Li L., and Kim C.-J. Microscale material testing of single crystal silicon: process effects on surface morphology and tensile strength. Sensors and Actuators: A 83 (2000) 172-178
10. Hu S.M. Critical stress in silicon brittle fracture, and effect of ion-implantation and other surface treatments. Journal of Applied Physics 53 (1982) 3576-3580
11. Chen K.-S., Ayon A.A., and Spearing S.M. Controlling and testing the fracture strength of silicon on a mesoscale. Journal of the American Ceramic Society 83 (2000) 1476-1484
12. Ericson F., and Schweitz J.-A. Micromechanical fracture strength of silicon. Journal of Applied Physics 68 (1990) 5840-5844
13. Wilson C.J., Ormeggi A., and Narbutovskih M. Fracture testing of silicon microcantilever beams. Journal of Applied Physics 79 (1996) 2386-2393
14. Finot M., Blech I.A., Suresh S., and Fujimoto H. Large deformation and geometric instability of substrates with thin-film deposits. Journal of Applied Physics 81 (1997) 3457-3464
15. Hung E.S., and Senturia S.D. Extending the travel range of analog-tuned electrostatic actuators. Journal of Microelectromechanical Systems 8 (1999) 497-505
16. Freund L.B., Floro J.A., and Chason E. Extensions of the Stoney formula for substrate curvature to configurations with thin substrates or large deformations. Applied Physics Letters 74 (1999) 1987-1989
17. von Preissig F.J. Applicability of the classical curvature-stress relation for thin films on plate substrates. Journal of Applied Physics 66 (1989) 4262-4268
18. Ikehara T., Zwijze R.A.F., and Ikeda K. New method for an accurate determination of residual strain in polycrystalline silicon films by analyzing resonant frequencies of micromachined beams. Journal of Micromechanics and Microengineering 11 (2001) 55-60
19. Petersen K.E., and Guarnieri C.R. Young's modulus measurements of thin films using micromechanics. Journal of Applied Physics 50 (1979) 6761-6766
20. Petersen K.E. Dynamic micromechanics on silicon: techniques and devices. IEEE Transactions on Electronic Devices 25 (1978) 1241-1250
21. Zhang L.M., Uttamchandant D., and Culshaw B. Measurement of the mechanical properties of silicon microresonators. Sensors and Actuators: A 29 (1991) 79-84
22. Knapp J.A., Follstaedt D.M., Myers S.M., Barbour J.C., and Friedmann T.A. Finite-element modeling of nanoindentation. Journal of Applied Physics 85 (1999) 1460-1474
23. Oliver W.C., and Pharr G.M. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. Journal of Materials Research 7 (1992) 1564-1583
24. Saha R., and Nix W.D. Effects of the substrate on the determination of thin film mechanical properties by nanoindentation. Acta Materiala 50 (2002) 23-38
25. H.D. Espinosa, B.C. Prorok, A novel experimental technique for testing thin films and MEMS materials, in: Proceedings of SEM, Annual Conference on Experimental and Applied Mechanics, Portland, Oregon, USA, June 2001.
26. Luo C., Schneider T.W., White R.C., Currie J., and Paranjape M. A simple deflection-testing method to determine Poisson's ratio for MEMS applications. Journal of Micromechanics and Microengineering 13 (2003) 129-133
27. Brüel & Kjær S. & V., Skodsborgvej 307, Nærum, 2850, Denmark, www.bksv.com.
28. G. Rinaldi, M. Packirisamy, I. Stiharu, A theoretical and experimental analysis of geometry conditioned microcantilevers, in: 4th Canadian Workshop on MEMS: Opportunities and Challenges on the Road to Integration, Ottawa, Ontario, Canada, August 2005.
29. Rinaldi G., Packirisamy M., and Stiharu I. Boundary characterization of microstructures through thermo-mechanical testing. Journal of Micromechanics and Microengineering 16 (2006) 549-556
30. Melles Griot, Canadian Office, 18 Antares Drive, Nepean, Ontario, K2E 1A9, Canada, www.mellesgriot.com.
31. MikroMasch, 9755 SW Commerce Cir, Suite B-1 Wilsonville, Oregon, 97070, USA, www.spmtips.com.
32. Micralyne Inc., 1911 94th Street, Edmonton, Alberta, T6N 1E6, Canada, www.micralyne.com.
33. Bhat R.B. Natural frequencies of rectangular plates using characteristic orthogonal polynomials in Rayleigh-Ritz method. Journal of Sound and Vibration 102 (1985) 493-499
34. Lam K.Y., Hung K.C., and Chow S.T. Vibration analysis of plates with cutouts by the modified Rayleigh-Ritz method. Applied Acoustics 28 (1989) 49-60
35. Mundkur G., Bhat R.B., and Neriya S. Vibration of plates with cut-outs using boundary characteristic orthogonal polynomial functions in the Rayleigh-Ritz method. Journal of Sound and Vibration 176 (1994) 136-144
36. G. Rinaldi, M. Packirisamy, I. Stiharu, Thermo-electrical influence on static and dynamic behaviour of cantilever type silicon waveguide, in: Proceedings of SPIE, International Conference on Photonic Devices, Toronto, Ontario, Canada, September 2005.
37. G. Rinaldi, M. Packirisamy, I. Stiharu, Electrostatic boundary conditioning of MEMS devices, in: Proceedings of the 8th International Cairo University MDP, Conference on Current Advances in Mechanical Design and Production VIII, Cairo, Egypt, January 2004.
38. Roberts R.B. Thermal expansion reference data: silicon 300-850 K. Journal of Physics D: Applied Physics 14 (1981) L163-L166
39. Han J., Zhu C., Liu J., and He Y. Dependence of the resonance frequency of thermally excited microcantilever resonators on temperature. Sensors and Actuators A 101 (2002) 37-41
40. Ono N., Kitamura K., Nakajima K., and Shimanuki Y. Measurement of Young's modulus of silicon single crystal at high temperature and its dependency on boron concentration using the flexural vibration method. Japanese Journal of Applied Physics 39 (2000) 368-371
41. Bhat R.B. Nature of stationarity of the natural frequencies at the natural modes in the Rayleigh-Ritz method. Journal of Sound and Vibration 203 (1997) 251-263