The nonlinear response of resonant microbeam systems with purely-parametric electrostatic actuation

Journal of Micromechanics and Microengineering

Volumn 16, Issue 5, 2006, Pages 890-899

  Rhoads, Jeffrey F ^a   Shaw, Steven W ^a   Turner, Kimberly L ^b  

^a Michigan State University   (United States)

^b University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL GEOMETRY; ELECTROSTATICS; MATHEMATICAL MODELS; RESONANCE;

COMPLEX DYNAMICS; PURELY-PARAMETRIC ELECTROSTATIC ACTUATION; RESONANT MICROBEAM SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 33744483113     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/5/003     Document Type: Article

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