Dynamics of MEMS resonators under superharmonic and subharmonic excitations

Journal of Micromechanics and Microengineering

Volumn 15, Issue 10, 2005, Pages 1840-1847

  Nayfeh, Ali H ^a   Younis, Mohammad I ^b  

^a State University   (United States)

^b State University of New York at Binghamton   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DAMPING; ELECTRIC LOADS; FREQUENCY RESPONSE; MATHEMATICAL MODELS; RESONATORS;

ELECTROSTATIC FORCE; MICROBEAMS; SECONDARY RESONANCE EXCITATIONS; SUPERHARMONIC EXCITATION;

MICROELECTROMECHANICAL DEVICES;

EID: 24644513877     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/10/008     Document Type: Review

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