Micromachined devices for wireless communications

Proceedings of the IEEE

Volumn 86, Issue 8, 1998, Pages 1756-1767

  Nguyen, Clark T C ^a,b   Katehi, Linda P B ^a,b   Rebeiz, Gabriel M ^a,b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b Department of Electrical Engineering and Computer Science ^*  (United States)

Author keywords

Acoustic resonators; Antennas; Filters; High q, if; MEMS; Micromachining; Oscillators; Phase noise; Resonators; RF; Switches; Synthesizers; Thin film inductors; Transceivers; Tunable; Wireless

Indexed keywords

ACOUSTIC RESONATORS; ANTENNAS; CAPACITORS; ELECTRIC INDUCTORS; MICROMACHINING; MINIATURE RADIO EQUIPMENT; OSCILLATORS (ELECTRONIC); RADIO COMMUNICATION; SPURIOUS SIGNAL NOISE; SWITCHES; TRANSCEIVERS; WAVE FILTERS;

MICROELECTROMECHANICAL SYSTEMS; MINIATURIZATION; SYNTHESIZER;

MICROELECTROMECHANICAL DEVICES;

EID: 0032137442     PISSN: 00189219     EISSN: None     Source Type: Journal    
DOI: 10.1109/5.704281     Document Type: Article

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