Fully Lagrangian modeling of MEMS with thin plates

Journal of Microelectromechanical Systems

Volumn 15, Issue 4, 2006, Pages 795-810

  Telukunta, Srinivas ^a,b   Mukherjee, Subrata ^a  

^a Cornell University   (United States)

^b Pixtronix Inc   (United States)

Author keywords

Aspect ratio; Boundary element method (BEM); Boundary integral equations; Microelectromechanical systems (MEMS); Nearly singular integrals; Newton scheme; Relaxation scheme; Singular integrals; Small gap; Thin plates; Thin shells

Indexed keywords

ASPECT RATIO; BOUNDARY ELEMENT METHOD; ELECTRIC CONDUCTORS; ELECTRIC FIELDS; FINITE ELEMENT METHOD; INTEGRAL EQUATIONS; MATHEMATICAL MODELS;

BOUNDARY INTEGRAL EQUATIONS; CHARGE DENSITIES; NEARLY SINGULAR INTEGRALS;

MICROELECTROMECHANICAL DEVICES;

EID: 33747417834     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.878891     Document Type: Article

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