Efficient mixed-domain analysis of electrostatic MEMS

IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems

Volumn 22, Issue 9, 2003, Pages 1228-1242

  Li, Gang ^a   Aluru, N R ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

Boundary cloud method (BCM); Coupled electromechanical analysis; Finite cloud method (FCM); Lagrangian electrostatics; Meshless methods

Indexed keywords

ALGORITHMS; BOUNDARY ELEMENT METHOD; COMPUTATIONAL METHODS; ELECTROSTATICS; FINITE ELEMENT METHOD; INTERPOLATION; LAGRANGE MULTIPLIERS; MICROACTUATORS; SEMICONDUCTOR SWITCHES;

BOUNDARY CLOUD METHOD; ELECTROSTATIC MICROELECTROMECHANICAL SYSTEM; FINITE CLOUD METHOD; LAGRANGIAN ELECTROSTATICS; MICROMIRROR DEVICE;

MICROELECTROMECHANICAL DEVICES;

EID: 0141628932     PISSN: 02780070     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCAD.2003.816210     Document Type: Article

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