An improved two-dimensional coupled electrostatic-mechanical model for RF MEMS switches

Journal of Micromechanics and Microengineering

Volumn 16, Issue 7, 2006, Pages 1424-1429

  Hamad, Ehab ^a   Omar, Abbas ^a  

^a OTTO VON GUERICKE UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTROSTATICS; FINITE DIFFERENCE METHOD; MECHANICAL PROPERTIES; OPTICAL SWITCHES; RESIDUAL STRESSES;

BEAM DEFORMATION; ELECTROSTATIC-MECHANICAL MODELS; PULL-DOWN VOLTAGE;

MICROELECTROMECHANICAL DEVICES;

EID: 33745068089     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/7/041     Document Type: Article

References (16)

1. Muldavin J B and Rebeiz G M 2000 High-isolation CPW MEMS shunt switches: Part 1. Modeling IEEE Trans. Microwave Theory Tech. 48 1045-52
2. Osterberg P M 1995 Electrostatically actuated microelctromechanical test structures for material property measurement PhD Dissertation Massachusetts Institute of Technology, Cambridge, MA, USA
3. Sabariego R V, Gyselinck J, Dular P, De Coster J, Henrotte F and Hameyer K 2004 Coupled mechanical-electrostatic FE-BE analysis with FMM acceleration: application to a shunt capacitive MEMS switch Int. J. Comput. Math. Electr. Electron. Eng. (COMPEL) 23 876-84
4. Huang J M, Liew K M, Wong C H, Rajendran S, Tan M J and Liu A Q 2001 Mechanical design and optimization of capacitive micromachined switch Sensors Actuators A 93 273-85
5. Choi B and Lovell E G 1997 Improved analysis of microbeams under mechanical and electrostatic loads J. Micromech. Microeng. 7 24-9
6. Meng Q, Mehregany M and Mullen L R 1993 Theoretical modeling of microfabricated beams with elastically restrained supports J. Microelectromech. Syst. 2 128-37
7. Hamad E K I, Safwat A M E and Omar A S 2005 2-D coupled electrostatic-mechanical model for shunt-capacitive MEMS switch based on Matlab program Proc. IEEE/ACES Int. Conf. (Honolulu, HI)
8. Zhu Y and Espinosa H D 2003 Design of radio frequency (RF) MEMS switches: modeling Proc. ASME Int. Mechanical Engineering Congress and Exposition (IMECE'03) (Washington, DC)
9. Gilbert J R, Legtenberg R and Senturia S D 1995 3D coupled electro-mechanics for MEMS: application of CoSolve-EM Proc. Int. IEEE MEMS Conf. pp 122-7
10. Abaqus ver. 6.5, ABAQUS, Inc., http://www.hks.com
11. IntelliSuite, IntelliSense Software Corp., http://www. intellisensesoftware.com
12. Ansys, ANSYS, Inc., http://www.ansys.com
13. Timoshenko S P and Gere J M 1961 Theory of Elastic Stability 2nd edn (New York: McGraw-Hill)
14. Rebeiz G M 2003 RF MEMS Theory, Design, and Technology (Hoboken, NJ: Wiley) pp 38-40
15. Goldsimith C L and Eshelman S 1998 Performance of low-loss RF MEMS capacitive switches IEEE Microw. Guid. Wave Lett. 8 269-71
16. Yao Z J, Chen S, Eshelman S and Goldsmith C 1999 Micromachend low-loss microwave switches J. Microelectromech. Syst. 8 129-34