A membrane micropump electrostatically actuated across the working fluid

Journal of Micromechanics and Microengineering

Volumn 15, Issue 12, 2005, Pages 2309-2316

  MacHauf, Andrew ^a   Nemirovsky, Yael ^a   Dinnar, Uri ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

FLIP CHIP DEVICES; MATHEMATICAL MODELS; MICROSTRUCTURE; PERMITTIVITY; RESIDUAL STRESSES;

ACTUATION VOLTAGE; FLOW RATES; MICROPUMPS; WORKING FLUIDS;

PUMPS;

EID: 27944476693     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/15/12/013     Document Type: Article

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