Computer-aided generation of nonlinear reduced-order dynamic macromodels-I: non-stress-stiffened case

Journal of Microelectromechanical Systems

Volumn 9, Issue 2, 2000, Pages 262-269

  Gabbay, Lynn D ^a,b   Mehner, Jan E ^a,c   Senturia, Stephen D ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b Chemnitz University of Technology ^*  (United States)

^c CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; ELECTRODES; ELECTROSTATICS; MATHEMATICAL MODELS; MODAL ANALYSIS; ORDINARY DIFFERENTIAL EQUATIONS; RESIDUAL STRESSES; THREE DIMENSIONAL;

BASIS FUNCTION METHODS; ELECTROSTATIC ACTUATION; MACROMODELS; NONLINEAR REDUCED ORDER DYNAMIC MACROMODELS; NONSTRESS STIFFENED CASE;

MICROELECTROMECHANICAL DEVICES;

EID: 0033705043     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.846707     Document Type: Article

References (16)

1. S. D. Senturia, "CAD challenges for microsensors, microactuators, and microsystems," Proc. IEEE, vol. 86, pp. 1611-1626, Aug 1998.
2. J. E. Mehner, L. D. Gabbay, and S. D. Senturia, "Computer-aided generation of nonlinear reduced-order dynamic macromodels - II: Stress-stiffened motion," J. Microelectromechanical Systems, vol. 9, pp. 270-278, June 2000.
3. S. D. Senturia, "CAD for microelectromechanical systems," in Proc. Int. Solid-State Sensors Actuators Conf., vol. 2, Stockholm, Sweden, June 25-29, 1995, pp. 5-8.
4. S. D. Senturia, N. Aluru, and J. White, "Simulating the behavior of MEMS devices: computational methods and needs," IEEE Comput. Sci. Eng. Mag., vol. 4, pp. 30-43, Jan. 1997.
5. L. D. Gabbay, "Computer-aided macromodeling for MEMS," Ph.D. dissertation, Dept. Elect. Eng. Comput. Sci., Massachusetts Inst. Technol., Cambridge, MA, 1998.
6. H. Goldstein, Classical Mechanics, 2nd ed. Reading, MA: Addison-Wesley, 1981, pp. 16-21.
7. L. Meinorovitch, Analytical Methods in Vibrations, New York: Macmillan, 1967.
8. H. A. Haus and J. R. Melcher, Electromagnetic Fields and Energy. Englewood Cliffs, NJ: Prentice-Hall, 1989.
9. G. K. Ananthasuresh, R. K. Gupta, and S. D. Senturia, "An approach to macromodeling of MEMS for nonlinear dynamic simulation," Microelectromech. Syst., ser. ASME Dynamic Systems and Control (DSC) Series, vol. 59, pp. 401-407, 1996.
10. J. Stöer and R. Bulirsch, Introduction to Numerical Analysis, 2nd ed. Berlin, Germany: Springer-Verlag, 1992.
11. W. H. Press and S. A. Teukolsky et al., Numerical Recipes in C: The Art of Scientific Computing, 2nd ed. Cambridge, U.K.: Cambridge Univ. Press, 1995, pp. 681-688.
12. M. Varghese, V. L. Rabinovich, and S. D. Senturia, "Reduced-order modeling of Lorentz force actuation with modal basis functions," in Proc. Modeling and Simulation Microsyst. Workshop, San Juan, Puerto Rico, April 19-21, 1999.
13. K. Nabors and J. White, "FastCap: Amultipole-accelerated 3-D capacitance extraction program," IEEE Trans. Computer-Aided Design, vol. 10, pp. 1447-1459, Nov. 1991.
14. J. S. Przemieniecki, Theory of Matrix Structural Analysis, New York: McGraw-Hill, 1968.
15. E. S. Hung. Y-J. Yang, and S. D. Senturia, "Low-order models for fast dynamical simulation of MEMS microstructures," in Proc. Int. Solid-State Sens. Actuators Conf., Chicago, June 1997, pp. 1101-1104.
16. E. S. Hung and S. D. Senturia, "Generating efficient dynamical models for microelectromechanical systems from a few finite-element simulation runs," J. Microelectromech. Syst., vol. 8, pp. 280-289, Sept. 1999.