Generating efficient dynamical models for microelectromechanical systems from a few finite-element simulation runs

Journal of Microelectromechanical Systems

Volumn 8, Issue 3, 1999, Pages 280-289

  Hung, Elmer S ^a,b   Senturia, Stephen D ^a  

^a USA   (United States)

^b PALO ALTO RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTROSTATICS; FINITE ELEMENT METHOD; PRESSURE TRANSDUCERS;

ELECTROSTATICALLY ACTUATED MICROBEAMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032594977     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.788632     Document Type: Article

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