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Journal of Micromechanics and Microengineering

Volumn 12, Issue 5, 2002, Pages 702-713

A physical model to predict stiction in MEMS

(3) Merlijn Van Spengen, W a,b Puers, Robert b De Wolf, Ingrid a

a IMEC (Belgium)

b UNIVERSITY OF LEUVEN (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; APPROXIMATION THEORY; ATMOSPHERIC HUMIDITY; CONDENSATION; ELECTROSTATICS; MATHEMATICAL MODELS; MOLECULAR DYNAMICS; STICTION; SURFACE ROUGHNESS; TEMPERATURE; VAN DER WAALS FORCES;

CAPILLARY CONDENSATION; MOLECULAR INTERACTIONS; SURFACE INTERACTION ENERGY;

MICROELECTROMECHANICAL DEVICES;

EID: 0036732328 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/12/5/329 Document Type: Article

Times cited : (209)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.