Full-Lagrangian schemes for dynamic analysis of electrostatic MEMS

Journal of Microelectromechanical Systems

Volumn 13, Issue 5, 2004, Pages 737-758

  De, Sudipto K ^a   Aluru, N R ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DYNAMICS; ELECTRIC FILTERS; ELECTRIC SWITCHES; ELECTROSTATICS; LAGRANGE MULTIPLIERS; MATRIX ALGEBRA; NATURAL FREQUENCIES; OSCILLATORS (ELECTRONIC); RESONANCE;

LAGRANGIAN ELECTROSTATICS; MEM FILTERS; MEM OSCILLATORS; MICROELECTROMECHANICAL SYSTEMS; NEWTON METHOD; SECOND SUPER HARMONIC RESONANCE; SWITCHING SPEED-AND-POWER;

MICROELECTROMECHANICAL DEVICES;

EID: 7244223647     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.835773     Document Type: Article

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