Deflection and stability of membrane structures under electrostatic and Casimir forces in microelectromechanical systems

Acta Mechanica

Volumn 180, Issue 1-4, 2005, Pages 49-60

  Wang, C ^a,b   Guo, W ^a,b   Feng, Q ^a,b  

^a Nanjing University of Aeronautics and Astronautics ^*

^b NANJING UNIVERSITY OF AERONAUTICS AND ASTRONAUTICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DEFLECTION (STRUCTURES); ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; PARAMETER ESTIMATION; STABILITY; THICKNESS MEASUREMENT;

CASIMIR FORCE; MEMBRANE STRUCTURES; STATIC STABILITY;

MEMBRANES;

EID: 29144487935     PISSN: 00015970     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00707-005-0265-8     Document Type: Article

References (11)

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