A reduced-order model for electrically actuated microbeam-based MEMS

Journal of Microelectromechanical Systems

Volumn 12, Issue 5, 2003, Pages 672-680

  Younis, Mohammad I ^a   Abdel Rahman, Eihab M ^a   Nayfeh, Ali ^a  

^a State University   (United States)

Author keywords

Capacitive microswitches; Microelectromechanical systems (MEMS); Pressure sensors; Pull in time; Reduced order models

Indexed keywords

DESIGN FOR TESTABILITY; ELECTRIC SWITCHES; ELECTRIC VARIABLES MEASUREMENT; MECHANICAL VARIABLES MEASUREMENT; MICROACTUATORS; MICROSENSORS; RESONATORS; SEMICONDUCTOR DEVICE MODELS;

CAPACITIVE MICROSWITCHES; PRESSURE SENSORS; REDUCED ORDER MODELS;

MICROELECTROMECHANICAL DEVICES;

EID: 0242636509     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.818069     Document Type: Article

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