The role of the Casimir effect in the static deflection and stiction of membrane strips in microelectromechanical systems (MEMS)

Journal of Applied Physics

Volumn 84, Issue 5, 1998, Pages 2501-2506

  Serry, F Michael ^a,b   Walliser, Dirk ^a,c   Maclay, G Jordan ^a  

^a University of Illinois at Chicago   (United States)

^b Digital Instruments   (United States)

^c DAIMLER AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000467327     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368410     Document Type: Article

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