Pull-in voltage analysis of electrostatically actuated beam structures with fixed-fixed and fixed-free end conditions

Journal of Micromechanics and Microengineering

Volumn 12, Issue 4, 2002, Pages 458-464

  Pamidighantam, Sayanu ^a   Puers, Robert ^b   Baert, Kris ^a   Tilmans, Harrie A C ^a  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COMPUTER SOFTWARE; ELECTRIC POTENTIAL; ELECTROSTATICS; FINITE ELEMENT METHOD;

FIXED-FIXED BEAMS; FIXED-FREE BEAMS; PULL--IN VOLTAGE ANALYSIS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036646594     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/4/319     Document Type: Article

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11. Pull-in voltage analysis of fixed-fixed beams
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