Dynamic analysis of variable-geometry electrostatic microactuators

Journal of Micromechanics and Microengineering

Volumn 16, Issue 11, 2006, Pages 2449-2457

  Najar, F ^a   Choura, S ^a   Abdel Rahman, E M ^b   El Borgi, S ^a   Nayfeh, A ^c  

^a UNIVERSITY OF CARTHAGE   (Tunisia)

^b UNIVERSITY OF WATERLOO   (Canada)

^c Virginia Polytechnic Institute and State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; FINITE DIFFERENCE METHOD; FREQUENCY RESPONSE; MATHEMATICAL MODELS; MICROSTRUCTURE; PARTIAL DIFFERENTIAL EQUATIONS;

DIFFERENTIAL QUADRATURE METHOD (DQM); ELECTROSTATIC FORCING; MICROBEAM THICKNESS; MID-PLANE STRETCHING;

ELECTROSTATIC ACTUATORS;

EID: 33750577522     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/11/028     Document Type: Article

References (23)

1. Younis M I 2001 Investigation of the Mechanical Behavior of Microbeam-Based MEMS Devices Master of Science Thesis Virginia Polytechnic Institute and State University
2. Najar F, Choura S, El-Borgi S, Abdel-Rahman E M and Nayfeh A H 2005 Modeling and design of variable-geometry electrostatic microactuators J. Micromech. Microeng. 15 419-29
3. De S K and Aluru N R 2004 Full-Lagrangian schemes for dynamic analysis of electrostatic MEMS J. Microelectromech. Syst. 13 737-58
4. Abdel-Rahman E M, Younis M I and Nayfeh A H 2002 Characterization of the mechanical behavior of an electrically actuated microbeam J. Micromech. Microeng. 12 759-66
5. Younis M I and Nayfeh A H 2003 A Study of the nonlinerar response of a resonant microbeam to an electric actuation Nonlinear Dyn. 31 91-117
6. Abdel-Rahman E M and Nayfeh A H 2003 Secondary resonances of electrically actuated resonant microsensors J. Micromech. Microeng. 13 1-11
7. Abdel-Rahman E M, Younis M I and Nayfeh A H 2005 Finite-amplitude motions of beam resonators and their stability J. Comput. Theor. Nanosci. 1 1-7
8. Nayfeh A H 1973 Perturbation Methods (New York: Wiley)
9. Nayfeh A H 1981 Introduction to Perturbation Techniques (New York: Wiley)
10. Nayfeh A H and Younis M I 2005 Dynamics of MEMS resonators under superharmonic and subharmonic excitations J. Micromech. Microeng. 15 1840-7
11. Nayfeh A H, Younis M I and Abdel-Rahman E M 2006 Dynamic pull-in phenomenon in MEMS resonators Nonlinear Dynamics at press
12. Elata D and Bamberger H 2006 On the dynamic pull-in of electrostatic actuators with multiple degrees of freedom and multiple voltage sources J. Microelectromech. Syst. 15 131-40
13. Gupta R K, Hung E S, Yang Y J, Ananthasuresh G K and Senturia S D 1996 Pull-in dynamics of electrostatically actuated beams Tech. Dig. Solid State Sensor and Actuator Workshop pp 1-2
14. Bienstman J, Puers R and Vandewalle J 1998 Periodic and chaotic behaviour of the autonomus impact resonator Proc. 11th Ann. Int. Workshop on MEMS (Heidelberg, Germany) pp 562-67
15. Wang Y C, Adams S G, Thorp J S, MacDonald N C, Hartwell P and Bertsch F 1998 Chaos in MEMS, parameter estimation and its potential application IEEE Trans. Circuits Syst. 45 1013-20
16. De S K and Aluru N R 2006 Complex nonlinear oscillations in electrostatically actuated Microstructures J. Microelectromech. Syst. 15 355-69
17. Lenci S and Rega G 2006 Control of pull-in dynamics in a nonlinear thermoelastic electrically actuated microbeam J. Micromech. Microeng. 16 390-401
18. Kuang J H and Chen C J 2004 Dynamic characteristics of shaped microactuators solved using the differential quadrature method J. Micromech. Microeng. 14 647-55
19. Chao P C P, Chiu C W and Tsai C Y 2006 A novel method to predict the pull-in voltage in a closed form for micro-plates actuated by a distributed electrostatic force J. Micromech. Microeng. 16 986-8
20. Nadal-Guardia R, Deh A, Aigner R and Castaner L M 2002 Current drive methods to extend the range of travel of electrostatic microactuators beyond the voltage pull-in point J. Microelectromech. Syst. 11 255-63
21. Hung E S and Senturia S D 1999 Extending the travel range of analog-tuned electrostatic actuators J. Microelectromech. Syst. 8 497-505
22. Nayfeh A H and Balachandran B 1995 Applied Nonlinear Dynamics (New York: Wiley)
23. Nayfeh A H and Mook D T 1979 Nonlinear Oscillations (New York: Wiley)