Characterization of the squeeze film damping effect on the quality factor of a microbeam resonator

Journal of Micromechanics and Microengineering

Volumn 14, Issue 10, 2004, Pages 1302-1306

  Zhang, C ^a   Xu, G ^a   Jiang, Q ^a  

^a University of California Riverside   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; ISOTHERMS; OSCILLATIONS; PARAMETER ESTIMATION; RESONATORS; REYNOLDS NUMBER;

GAS FILMS; MICROBEAM RESONATORS; SQUEEZE FILM; SQUEEZE NUMBER;

VIBRATIONS (MECHANICAL);

EID: 7044274392     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/10/003     Document Type: Article

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