Higher order correction of electrostatic pressure and its influence on the pull-in behavior of microstructures

Journal of Micromechanics and Microengineering

Volumn 16, Issue 7, 2006, Pages 1382-1396

  Krylov, Slava ^a   Seretensky, Shimon ^a  

^a TEL AVIV UNIVERSITY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRODES; GEOMETRY; MECHANICAL PROPERTIES; MICROACTUATORS; MICROSTRUCTURE; PERTURBATION TECHNIQUES;

ELECTROSTATIC MICROACTUATORS; ELECTROSTATIC PRESSURE; TENSILE FORCE;

ELECTROSTATICS;

EID: 33745086552     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/7/036     Document Type: Article

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