Simulating the behavior of MEMS devices: Computational methods and needs

IEEE computational science & engineering

Volumn 4, Issue 1, 1997, Pages 30-43

  Senturia, Stephen D ^a   Aluru, Narayan ^a   White, Jacob ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTATIONAL METHODS; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; ELECTRODYNAMICS; ELECTROSTATICS; INTEGRAL EQUATIONS; MICROMACHINING; OPTIMIZATION; VECTORS;

DYNAMICAL MACROMODELS; INTEGRAL FORMULATIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 0030682930     PISSN: 10709924     EISSN: None     Source Type: Journal    
DOI: 10.1109/99.590854     Document Type: Article

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