A reduced-order model for electrically actuated clamped circular plates

Journal of Micromechanics and Microengineering

Volumn 15, Issue 4, 2005, Pages 684-690

  Vogl, Gregory W ^a   Nayfeh, Ali H ^a  

^a State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DATA REDUCTION; ELECTRIC POTENTIAL; GALERKIN METHODS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; ORDINARY DIFFERENTIAL EQUATIONS; PROBLEM SOLVING; SILICON; STRUCTURAL DESIGN; SYSTEM STABILITY; ULTRASONIC TRANSDUCERS;

CAPACITIVE MICROMACHINED ULTRASOUND TRANSDUCERS (CMUT); CIRCULAR PLATES; MICROMACHINED ULTRASONIC TRANSDUCERS (MUT); REDUCED-ORDER MODELS;

PLATES (STRUCTURAL COMPONENTS);

EID: 17444402896     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/4/002     Document Type: Article

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