Theoretical study of the sticking of a membrane strip in MEMS under the Casimir effect

Journal of Micromechanics and Microengineering

Volumn 11, Issue 3, 2001, Pages 202-208

  Ding, Jian Ning ^a   Wen, Shi Zhu ^a   Meng, Yong Gang ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CAPILLARY FLOW; DEFORMATION; ELECTRIC CONDUCTIVITY; MEMBRANES; SURFACE ROUGHNESS;

CASIMIR EFFECTS; MEMBRANE STRIPS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035336323     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/11/3/307     Document Type: Article

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