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Volumn 126, Issue 3, 2004, Pages 332-342

Pull-in dynamics of an elastic beam actuated by continuously distributed electrostatic force

Author keywords

[No Author keywords available]

Indexed keywords

BEAMS AND GIRDERS; BOUNDARY CONDITIONS; DAMPING; DYNAMICS; ELECTROSTATICS; GALERKIN METHODS; MATHEMATICAL MODELS; STABILITY;

EID: 4444272849     PISSN: 10489002     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1760559     Document Type: Article
Times cited : (173)

References (29)
  • 1
    • 0031168990 scopus 로고    scopus 로고
    • M-test: A test chip for MEMS material property measurement using electrostatically actuated test structures
    • Ostenberg, P. M., and Senturia, S. D., 1997, "M-Test: A Test Chip for MEMS Material Property Measurement Using Electrostatically Actuated Test Structures," J. Microelectromech. Syst., 6(2), pp. 107-115.
    • (1997) J. Microelectromech. Syst. , vol.6 , Issue.2 , pp. 107-115
    • Ostenberg, P.M.1    Senturia, S.D.2
  • 3
    • 85041133087 scopus 로고    scopus 로고
    • Bifurcation of equilibria in micromachined elastic structures with electrostatic actuation
    • Wang, P. K. C., 2001, "Bifurcation of Equilibria in Micromachined Elastic Structures with Electrostatic Actuation," Int. J. Bifurcation Chaos Appl. Sci. Eng., 11(2), pp. 469-482.
    • (2001) Int. J. Bifurcation Chaos Appl. Sci. Eng. , vol.11 , Issue.2 , pp. 469-482
    • Wang, P.K.C.1
  • 4
    • 0036772611 scopus 로고    scopus 로고
    • An efficient DIPIE algorithm for CAD of electrostatically actuated MEMS devices
    • Bochobza-Degani, O., Elata, D., and Nemirovsky, Y., 2002, "An Efficient DIPIE Algorithm for CAD of Electrostatically Actuated MEMS Devices," J. Microelectromech. Syst., 11(5), pp. 612-620.
    • (2002) J. Microelectromech. Syst. , vol.11 , Issue.5 , pp. 612-620
    • Bochobza-Degani, O.1    Elata, D.2    Nemirovsky, Y.3
  • 6
    • 1342337622 scopus 로고    scopus 로고
    • Chaotic motion in a micor-electro-mechanical system with non-linearity from capacitors
    • Luo, A. C. J., and Wang, F. Y., 2002, "Chaotic Motion in a Micor-Electro-Mechanical System with Non-linearity from Capacitors," Communications in Nonlinear Science and Numerical Simulation, 7, pp. 31-49.
    • (2002) Communications in Nonlinear Science Numerical Simulation , vol.7 , pp. 31-49
    • Luo, A.C.J.1    Wang, F.Y.2
  • 7
    • 0033692191 scopus 로고    scopus 로고
    • Computer-aided generation of nonlinear reduced-order dynamic macromodels-II: Stress-stiffened case
    • Gabbay, L. D., Mehner, J. E., and Senturia, S. D., 2000, "Computer-Aided Generation of Nonlinear Reduced-Order Dynamic Macromodels-II: Stress-Stiffened Case," J. Microelectromech. Syst., 9(2), pp. 270-278.
    • (2000) J. Microelectromech. Syst. , vol.9 , Issue.2 , pp. 270-278
    • Gabbay, L.D.1    Mehner, J.E.2    Senturia, S.D.3
  • 8
    • 0036851112 scopus 로고    scopus 로고
    • Characterization of the mechanical behavior of an electrically actuated microbeam
    • Abdel-Rahman, E. M., Younis, M. I., and Nayfeh, A. H., 2002, "Characterization of the Mechanical Behavior of an Electrically Actuated Microbeam," J. Micromech. Microeng., 12(6), pp. 759-766.
    • (2002) J. Micromech. Microeng. , vol.12 , Issue.6 , pp. 759-766
    • Abdel-Rahman, E.M.1    Younis, M.I.2    Nayfeh, A.H.3
  • 9
    • 0036600512 scopus 로고    scopus 로고
    • A dynamic model including contact bounce of an electrostatically actuated microswitch
    • McCarthy, B., Adams, G. G., McGruer, N. E., and Potter, D., 2002, "A Dynamic Model, Including Contact Bounce, of an Electrostatically Actuated Microswitch," J. Microelectromech. Syst., 11(3), pp. 276-283.
    • (2002) J. Microelectromech. Syst. , vol.11 , Issue.3 , pp. 276-283
    • McCarthy, B.1    Adams, G.G.2    McGruer, N.E.3    Potter, D.4
  • 11
    • 0033068262 scopus 로고    scopus 로고
    • Theory simulation of viscous damped reflection phase gratings
    • Furlani, E. P., 1999, "Theory and Simulation of Viscous Damped Reflection Phase Gratings," J. Phys. D, 32, pp. 412-416.
    • (1999) J. Phys. D , vol.32 , pp. 412-416
    • Furlani, E.P.1
  • 12
    • 0032594981 scopus 로고    scopus 로고
    • Speed-energy optimization of electrostatic actuators based on pull-in
    • Castaner, L. M., and Senturia, S. D., 1999, "Speed-Energy Optimization of Electrostatic Actuators Based on Pull-in," J. Microelectromech. Syst., 8(3), pp. 290-298.
    • (1999) J. Microelectromech. Syst. , vol.8 , Issue.3 , pp. 290-298
    • Castaner, L.M.1    Senturia, S.D.2
  • 13
    • 0033705043 scopus 로고    scopus 로고
    • Computer-aided generation of nonlinear reduced-order dynamic macromodels-I: Non-stress-stiffened case
    • Gabbay, L. D., Mehner, J. E., and Senturia, S. D., 2000, "Computer-Aided Generation of Nonlinear Reduced-Order Dynamic Macromodels-I: Non-Stress-Stiffened case," J. Microelectromech. Syst., 9(2), pp. 262-269.
    • (2000) J. Microelectromech. Syst. , vol.9 , Issue.2 , pp. 262-269
    • Gabbay, L.D.1    Mehner, J.E.2    Senturia, S.D.3
  • 14
    • 0032594977 scopus 로고    scopus 로고
    • Generating efficient dynamical models for microelectromechanical systems from a few finite-element simulation runs
    • Hung, E. S., and Senturia, S. D., 1999, "Generating Efficient Dynamical Models for Microelectromechanical Systems from a Few Finite-Element Simulation Runs," J. Microelectromech. Syst., 8(3), pp. 280-289.
    • (1999) J. Microelectromech. Syst. , vol.8 , Issue.3 , pp. 280-289
    • Hung, E.S.1    Senturia, S.D.2
  • 16
    • 85024588795 scopus 로고
    • On isothermal squeeze films
    • Blech, J. J., 1983, "On Isothermal Squeeze Films," ASME J. Lubr. Technol., 105, pp. 615-620.
    • (1983) ASME J. Lubr. Technol. , vol.105 , pp. 615-620
    • Blech, J.J.1
  • 17
    • 0032163224 scopus 로고    scopus 로고
    • Squeeze film damping effects on the dynamic response of a MEMS torsion mirror
    • Pan, F., Kubby, J., Peters, E., Tran, A. T., and Mucherjee, S., 1998, "Squeeze Film Damping Effects on the Dynamic Response of a MEMS Torsion Mirror," J. Micromech. Microeng., 8(3), pp. 200-208.
    • (1998) J. Micromech. Microeng. , vol.8 , Issue.3 , pp. 200-208
    • Pan, F.1    Kubby, J.2    Peters, E.3    Tran, A.T.4    Mucherjee, S.5
  • 18
    • 0036732304 scopus 로고    scopus 로고
    • Squeeze film damping effect on a MEMS torsion mirror
    • Chang, K. M., Lee, S. C., and Li, S. H., 2002, "Squeeze Film Damping Effect on a MEMS Torsion Mirror," J. Micromech. Microeng., 12(5), pp. 556-561.
    • (2002) J. Micromech. Microeng. , vol.12 , Issue.5 , pp. 556-561
    • Chang, K.M.1    Lee, S.C.2    Li, S.H.3
  • 19
    • 0030717786 scopus 로고    scopus 로고
    • Pull-in dynamics as a measure of the ambient pressure
    • IEEE, Piscataway, NJ
    • Gupta, K., G., and Senturia, S. D., 1997, "Pull-in Dynamics as a Measure of the Ambient Pressure," Proc. IEEE Micro Electro Mechanical Systems, IEEE, Piscataway, NJ, pp. 290-294.
    • (1997) Proc. IEEE Micro Electro Mechanical Systems , pp. 290-294
    • Gupta, K.G.1    Senturia, S.D.2
  • 21
    • 0000033761 scopus 로고
    • Natural frequencies of a uniform cantilever with a tip mass slender in the axial direction
    • Bhat, B. R., and Wagner, H., 1976, "Natural Frequencies of a Uniform Cantilever With a Tip Mass Slender in the Axial Direction," J. Sound Vib., 45(2), pp. 304-307.
    • (1976) J. Sound Vib. , vol.45 , Issue.2 , pp. 304-307
    • Bhat, B.R.1    Wagner, H.2
  • 22
    • 0036646594 scopus 로고    scopus 로고
    • Pull-in voltage analysis of electrostatically actuated beam structures with fixed-fixed fixed-free end conditions
    • Pamidighantam, S., Puers, R., Baert, K., and Tilmans, H. A. C., 2002, "Pull-in Voltage Analysis of Electrostatically Actuated Beam Structures with Fixed-Fixed and Fixed-Free End Conditions," J. Micromech. Microeng., 12(4), pp. 458-64.
    • (2002) J. Micromech. Microeng. , vol.12 , Issue.4 , pp. 458-464
    • Pamidighantam, S.1    Puers, R.2    Baert, K.3    Tilmans, H.A.C.4
  • 23
    • 4444264789 scopus 로고
    • Technion report EEC-111
    • Blech, J., J., 1980, "Squeeze Films," Technion report EEC-111
    • (1980) Squeeze Films
    • Blech, J.J.1
  • 25
    • 0027557596 scopus 로고
    • A comparison of squeeze-film theory with measurements on a microstructure
    • Andrews, M., Harris, I., and Turner, G., 1993, "A Comparison of Squeeze-Film Theory with Measurements on a Microstructure," Sens. Actuators, A, 36, pp. 79-87.
    • (1993) Sens. Actuators A , vol.36 , pp. 79-87
    • Andrews, M.1    Harris, I.2    Turner, G.3
  • 28
    • 0035441291 scopus 로고    scopus 로고
    • Effect of specimen size on young's modulus fracture strength of polysilicon
    • Sharpe, W. N., Jackson, K. M., Hemker, K. J., and Xie, Z., 2001, "Effect of Specimen Size on Young's Modulus and Fracture Strength of Polysilicon," J. Microelectromech. Syst., 10(3), pp. 317-326.
    • (2001) J. Microelectromech. Syst. , vol.10 , Issue.3 , pp. 317-326
    • Sharpe, W.N.1    Jackson, K.M.2    Hemker, K.J.3    Xie, Z.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.