Dynamic characteristics of shaped micro-actuators solved using the differential quadrature method

Journal of Micromechanics and Microengineering

Volumn 14, Issue 4, 2004, Pages 647-655

  Kuang, Jao Hwa ^a   Chen, Chao Jung ^a  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DEFLECTION (STRUCTURES); ELECTRODES; ELECTRON BEAMS; FREQUENCY AGILITY; RESIDUAL STRESSES; RESONATORS; STRETCHING; VIBRATIONS (MECHANICAL); VOLTAGE MEASUREMENT;

DIFFERENTIAL QUADRATURE METHOD; FRINGING EFFECT; MICRO-BEAM; SHAPED ACTUATORS;

ELECTROSTATIC ACTUATORS;

EID: 2342559240     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/4/028     Document Type: Article

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