Modelling electrostatic behaviour of microcantilevers incorporating residual stress gradient and non-ideal anchors

Journal of Micromechanics and Microengineering

Volumn 15, Issue 7, 2005, Pages

  Lishchynska, Maryna ^a   Cordero, Nicolas ^a   Slattery, Orla ^a   O'Mahony, Conor ^a  

^a UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELASTIC MODULI; ELECTRIC POTENTIAL; ELECTROSTATICS; FINITE ELEMENT METHOD; MICROMACHINING; PRODUCT DESIGN; RESIDUAL STRESSES; STIFFNESS;

DEFLECTION MODELS; MICROCANTILEVERS; STRESS GRADIENTS; VOLTAGE ANALYSIS;

MICROELECTROMECHANICAL DEVICES;

EID: 21044438007     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/7/002     Document Type: Article

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