Dual-axis optical mirror positioning using a nonlinear closed-loop controller

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 560-563

  Juneau, T ^a   Unterkofler, K ^a   Seliverstov, T ^a   Zhang, S ^a   Judy, M ^a  

^a ANALOG DEVICES INC   (United States)

Author keywords

Control systems; Coupling circuits; Driver circuits; Force control; Integrated optics; Mirrors; Nonlinear optics; Optical control; System on a chip; Voltage control

Indexed keywords

ACTUATORS; APPLICATION SPECIFIC INTEGRATED CIRCUITS; CONTROL SYSTEMS; COUPLED CIRCUITS; FORCE CONTROL; INTEGRATED OPTICS; MICROSYSTEMS; MIRRORS; NONLINEAR OPTICS; SOLID-STATE SENSORS; SYSTEM-ON-CHIP; TRANSDUCERS; VOLTAGE CONTROL;

CLOSED LOOP CONTROLLERS; DRIVER CIRCUIT; ECONOMICAL INTEGRATION; HIGH-VOLTAGE DRIVERS; HIGHER-ORDER MODES; MICROPROCESSOR CONTROL; OPTICAL CONTROL; SYSTEM ON A CHIP;

CONTROLLERS;

EID: 84867100801     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215378     Document Type: Conference Paper

References (6)

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