A Lagrangian approach for electrostatic analysis of deformable conductors

Journal of Microelectromechanical Systems

Volumn 11, Issue 3, 2002, Pages 245-254

  Li, Gang ^b   Aluru, N R ^a,b  

^a IEEE   (United States)

^b University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LAGRANGIAN ELECTROSTATIC ANALYSIS;

ALGORITHMS; COMPUTATIONAL METHODS; ELECTROSTATIC ACTUATORS; ELECTROSTRICTION; MICROELECTROMECHANICAL DEVICES;

ELECTRIC CONDUCTORS;

EID: 0036600501     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.1007403     Document Type: Article

References (11)

1. A computer-aided design system for microelectromechanical systems
2. 3D coupled electromechanics for MEMS: Applications of CoSolve-EM
3. An efficient numerical technique for electromechanical simulation of complicated microelectromechanical structures
4. Robust algorithms for boundary-element integrals on curved surfaces
5. On the application of 2D potential theory to electrostatic simulation