A novel electrostatic micromachined pump for drug delivery systems

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE

Volumn , Issue , 2002, Pages 105-109

  Teymoori, M M ^a   Abbaspour Sani, E ^a  

^a URMIA UNIVERSITY   (Iran)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE VALVES; ACTUATION SYSTEMS; ACTUATION VOLTAGES; DRUG DELIVERY SYSTEM; ELECTROSTATIC ACTUATION; IC PROCESS; INTEGRATION CAPABILITY; LOW ACTUATION VOLTAGE; LOW-POWER CONSUMPTION; MECHANICAL RESPONSE; MICRO PUMP; MICROMACHINED; NOVEL STRUCTURES; OUTPUT PORTS; PERISTALTIC MOTION; PUMPING MECHANISM;

BATCH DATA PROCESSING; DIAPHRAGMS; DRUG DELIVERY; ELECTROSTATIC ACTUATORS; FINITE ELEMENT METHOD; SILICON WAFERS; WAFER BONDING;

PUMPS;

EID: 36448929700     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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