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Volumn 31, Issue 1, 2003, Pages 91-117

A study of the nonlinear response of a resonant microbeam to an electric actuation

Author keywords

Forced vibration; MEMS; Primary resonance; Resonator

Indexed keywords

ELECTROSTATICS; HARDENING; MICROELECTROMECHANICAL DEVICES; ORDINARY DIFFERENTIAL EQUATIONS; PERTURBATION TECHNIQUES; RESONANCE;

EID: 0037284599     PISSN: 0924090X     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1022103118330     Document Type: Article
Times cited : (503)

References (22)
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    • Tilmans, H.A.1    Legtenberg, R.2
  • 11
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    • Turner, G. C. and Andrews, M. K., 'Frequency stabilization of electrostatic oscillators', in Digest of the 8th International Conference on Solid-State Sensors and Actuators, Vol. 2, Stockholm, Sweden, S. Middelhoek and K. Cammann (eds.), Elsevier, Amsterdam, 1995, Vol. 2, pp. 624-626.
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    • Electrostatically driven vacuum-encapsulated polysilicon resonators. Part I. Design and fabrication
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.