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Volumn 14, Issue 7, 2004, Pages 900-906

A reduced-order model for electrically actuated microplates

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; BOUNDARY CONDITIONS; CONTROL NONLINEARITIES; COUPLED CIRCUITS; DEFLECTION (STRUCTURES); EIGENVALUES AND EIGENFUNCTIONS; EQUATIONS OF MOTION; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; STRETCHING; VIBRATION CONTROL;

EID: 3142689549     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/7/009     Document Type: Article
Times cited : (124)

References (18)
  • 5
    • 0028529046 scopus 로고
    • Electrostatically driven vacuum-encapsulated polysilicon resonators: Part II. Theory and performance
    • Tilmans H A and Legtenberg R 1994 Electrostatically driven vacuum-encapsulated polysilicon resonators: part II. Theory and performance Sensors Actuators A 45 67-84
    • (1994) Sensors Actuators A , vol.45 , pp. 67-84
    • Tilmans, H.A.1    Legtenberg, R.2
  • 7
    • 0005845002 scopus 로고    scopus 로고
    • Normalized abacus for the global behavior of diaphragms: Pneumatic, electrostatic, piezoelectric or electromagnetic actuation
    • Francais O and Dufour I 1999 Normalized abacus for the global behavior of diaphragms: pneumatic, electrostatic, piezoelectric or electromagnetic actuation J. Model, Simul. Microsyst. 2 149-60
    • (1999) J. Model, Simul. Microsyst. , vol.2 , pp. 149-160
    • Francais, O.1    Dufour, I.2
  • 8
    • 85047172549 scopus 로고    scopus 로고
    • A coupled field study on the non-linear dynamic characteristics of an electrostatic micropump
    • at press
    • Ng T Y, Jiang T Y, Li H, Lam K Y and Reddy J N A coupled field study on the non-linear dynamic characteristics of an electrostatic micropump J. Sound Vib. at press
    • J. Sound Vib.
    • Ng, T.Y.1    Jiang, T.Y.2    Li, H.3    Lam, K.Y.4    Reddy, J.N.5
  • 13
    • 0003758712 scopus 로고
    • Melville, NY: Acoustical Society of America
    • Leissa A W 1993 Vibration of Plates (Melville, NY: Acoustical Society of America)
    • (1993) Vibration of Plates
    • Leissa, A.W.1
  • 17
    • 0024656229 scopus 로고
    • The application of symbolic computing to the hierarchical finite element method
    • Bordell N S 1989 The application of symbolic computing to the hierarchical finite element method Int. J. Numer. Methods Eng. 28 1181-204
    • (1989) Int. J. Numer. Methods Eng. , vol.28 , pp. 1181-1204
    • Bordell, N.S.1
  • 18
    • 0026420118 scopus 로고
    • Free vibration analysis of a flat plate using the hierarchical finite element method
    • Bardell N S 1991 Free vibration analysis of a flat plate using the hierarchical finite element method J. Sound Vib. 151 263-89
    • (1991) J. Sound Vib. , vol.151 , pp. 263-289
    • Bardell, N.S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.