Nonlinear dynamic analysis of MEMS switches by nonlinear modal analysis

Nonlinear Dynamics

Volumn 31, Issue 3, 2003, Pages 243-256

  Xie, W C ^a   Lee, H P ^a,b   Lim, S P ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF HIGH PERFORMANCE COMPUTING   (Singapore)

Author keywords

Clamped clamped micro beams; Micro switch; Nonlinear modal analysis

Indexed keywords

BEAMS AND GIRDERS; COMPUTER SIMULATION; ELECTRIC POTENTIAL; ELECTROSTATICS; EQUATIONS OF MOTION; FINITE DIFFERENCE METHOD; FINITE ELEMENT METHOD; GYROSCOPES; MICROSTRUCTURE; NONLINEAR SYSTEMS; PARTIAL DIFFERENTIAL EQUATIONS; PHASE SPACE METHODS; SIGNAL PROCESSING; STRUCTURES (BUILT OBJECTS); SWITCHES;

NONLINEAR MODAL ANALYSIS;

MICROELECTROMECHANICAL DEVICES;

EID: 0037304951     PISSN: 0924090X     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1022914020076     Document Type: Review

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