Macromodeling of coupled-domain MEMS devices with electrostatic and electrothermal effects

Journal of Micromechanics and Microengineering

Volumn 14, Issue 8, 2004, Pages 1190-1196

  Yang, Yao Joe ^a   Cheng, Szu Yuan ^a   Shen, Kuo Yeh ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; DYNAMICS; ELASTIC MODULI; ELECTRIC POTENTIAL; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; FINITE ELEMENT METHOD; HEAT LOSSES; LINEAR SYSTEMS; MATHEMATICAL MODELS; NATURAL FREQUENCIES; TEMPERATURE MEASUREMENT;

ELECTROSTATIC EFFECTS; ELECTROTHERMAL EFFECTS; MACROMODELING; MEMS DEVICES;

COUPLED CIRCUITS;

EID: 4243118612     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/8/011     Document Type: Article

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