Electromechanical model of electrically actuated narrow microbeams

Journal of Microelectromechanical Systems

Volumn 15, Issue 5, 2006, Pages 1175-1189

  Batra, Romesh C ^a   Porfiri, Maurizio ^b   Spinello, Davide ^a  

^a Virginia Polytechnic Institute and State University   (United States)

^b POLYTECHNIC UNIVERSITY   (United States)

Author keywords

Fringing fields; Meshless local Petrov Galerkin (MLPG) method; Microactuators; Microbeams; Microelectromechanical systems (MEMS); Microelectromechanical systems (MEMS) modeling; Microsensors; Microstructures; Pull in instability; Pull in voltage; Reduced order models

Indexed keywords

MESHLESS LOCAL PETROV-GALERKIN (MLPG) METHOD; MICROBEAMS; PULL-IN INSTABILITY; PULL-IN VOLTAGE; REDUCED ORDER MODELS;

BOUNDARY CONDITIONS; DEGREES OF FREEDOM (MECHANICS); DIFFERENTIAL EQUATIONS; ELECTROSTATICS; FINITE ELEMENT METHOD; GALERKIN METHODS; LAGRANGE MULTIPLIERS; MATHEMATICAL MODELS; METHOD OF MOMENTS; MICROACTUATORS; NONLINEAR EQUATIONS; STIFFNESS;

MICROELECTROMECHANICAL DEVICES;

EID: 33750001571     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.880204     Document Type: Article

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