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Volumn 92, Issue 5, 2002, Pages 2789-2794
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Electromechanical instability of microscale structures
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Author keywords
[No Author keywords available]
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Indexed keywords
CLOSED FORM SOLUTIONS;
CONTACT LENGTH;
CONTACT PROBLEM;
CRITICAL VALUE;
ELASTIC-MEMBRANE THEORY;
ELECTRIC VOLTAGE;
ELECTROMECHANICAL INSTABILITY;
ELECTROMECHANICAL INTERACTIONS;
EQUILIBRIUM STATE;
FAILURE MECHANISM;
INITIALLY STRESS;
LINE FORCES;
MECHANICAL DEFORMATION;
MEMS-STRUCTURE;
MICRO-SCALE STRUCTURES;
MICRO-SCALES;
PULL-IN;
PULL-IN INSTABILITY;
RESIDUAL LINES;
SQUARE ROOTS;
TENSILE FORCES;
ELECTRIC FIELDS;
ELECTROMECHANICAL DEVICES;
LOADING;
MEMS;
MEMBRANES;
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EID: 0036735522
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1496123 Document Type: Article |
Times cited : (38)
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References (14)
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