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Volumn 92, Issue 5, 2002, Pages 2789-2794

Electromechanical instability of microscale structures

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED FORM SOLUTIONS; CONTACT LENGTH; CONTACT PROBLEM; CRITICAL VALUE; ELASTIC-MEMBRANE THEORY; ELECTRIC VOLTAGE; ELECTROMECHANICAL INSTABILITY; ELECTROMECHANICAL INTERACTIONS; EQUILIBRIUM STATE; FAILURE MECHANISM; INITIALLY STRESS; LINE FORCES; MECHANICAL DEFORMATION; MEMS-STRUCTURE; MICRO-SCALE STRUCTURES; MICRO-SCALES; PULL-IN; PULL-IN INSTABILITY; RESIDUAL LINES; SQUARE ROOTS; TENSILE FORCES;

EID: 0036735522     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1496123     Document Type: Article
Times cited : (38)

References (14)
  • 12
    • 0032687006 scopus 로고    scopus 로고
    • spi PSISDG 0277-786X
    • E. K. Chan and R. W. Dutton, Proc. SPIE 3680, 120 (1999). spi PSISDG 0277-786X
    • (1999) Proc. SPIE , vol.3680 , pp. 120
    • Chan, E.K.1    Dutton, R.W.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.