Polymer self assembly in semiconductor microelectronics

IBM Journal of Research and Development

Volumn 51, Issue 5, 2007, Pages 605-633

  Black, Charles T ^a   Ruiz, Ricardo ^b   Breyta, Gregory ^c   Cheng, Joy Y ^c   Colburn, Matthew E ^d   Guarini, Kathryn W ^e   Kim, Ho Cheol ^c   Zhang, Ying ^d  

^a BROOKHAVEN NATIONAL LABORATORY   (United States)

^b SAN JOSE RESEARCH CENTER   (United States)

^c IBM ALMADEN RESEARCH CENTER   (United States)

^d IBM T J WATSON RESEARCH CENTER   (United States)

^e IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; POLYMERS; SCALABILITY; SELF ASSEMBLY; SEMICONDUCTOR DEVICE MANUFACTURE;

DIMENSIONAL SCALABILITY; POLYMER SELF ASSEMBLY; SEMICONDUCTOR DEVICE FABRICATION; SEMICONDUCTOR MICROELECTRONICS;

MICROELECTRONICS;

EID: 34948854470     PISSN: 00188646     EISSN: 00188646     Source Type: Journal    
DOI: 10.1147/rd.515.0605     Document Type: Review

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