Patterning with block copolymer thin films

Materials Science and Engineering R: Reports

Volumn 48, Issue 6, 2005, Pages 191-226

  Segalman, Rachel A ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Block copolymer lithography; Block copolymers; Microphase separation; Nanopatterning; Polymer self assembly; Thin films

Indexed keywords

BLOCK COPOLYMERS; CHEMICAL BONDS; EPITAXIAL GROWTH; HOMOPOLYMERIZATION; LITHOGRAPHY; NANOSTRUCTURED MATERIALS; SELF ASSEMBLY;

BLOCK COPOLYMER LITHOGRAPHY; MICROPHASE SEPARATION; NANOPATTERNING; POLYMER SELF-ASSEMBLY;

THIN FILMS;

EID: 14544269786     PISSN: 0927796X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mser.2004.12.003     Document Type: Review

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