Local defectivity control of 2D self-assembled block copolymer patterns

Advanced Materials

Volumn 19, Issue 16, 2007, Pages 2157-2162

  Ruiz, Ricardo ^a,b   Ruiz, Niranjana ^a   Zhang, Ying ^a   Sandstrom, Robert L ^a   Black, Charles T ^a,c  

^a IBM T J WATSON RESEARCH CENTER   (United States)

^b SAN JOSE RESEARCH CENTER   (United States)

^c BROOKHAVEN NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; FREE ENERGY; LITHOGRAPHY; SELF ASSEMBLED MONOLAYERS; THERMODYNAMICS; THIN FILMS;

LITHOGRAPHIC APPLICATIONS; SELF ASSEMBLED BLOCK COPOLYMER PATTERNS; SURFACE GEOMETRIES; THERMODYNAMIC SELF ASSEMBLING SYSTEMS;

BLOCK COPOLYMERS;

EID: 34548312482     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.200602470     Document Type: Article

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