Nanolithographic templates from diblock copolymer thin films

Applied Physics Letters

Volumn 68, Issue 18, 1996, Pages 2586-2588

  Mansky, P ^a   Harrison, C K ^a   Chaikin, P M ^a   Register, R A ^b   Yao, N ^a  

^a PRINCETON UNIVERSITY   (United States)

^b Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012224964     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116192     Document Type: Review

References (25)

1. D. Weiss, M. L. Roukes, A. Menschig, P. Grambow, K. Von Klitzing, and G. Weimann, Phys. Rev. Lett. AIP 66, 2790 (1991).
2. W. Kang, H. L. Stormer, L. N. Pfeiffer, K. W. Baldwin, and K. W. West, Phys. Rev. Lett. AIP 23, 3850 (1993).
3. W. D. Volkmuth and R. H. Austin, Nature 358, 600 (1992); W. D. Volkmuth, T. Duke, M. C. Wu, R. H. Austin, and Attila Szabo, Phys. Rev. Lett. 72, 2117 (1994).
4. M. H. Kryder, Thin Solid Films INS 216, 174 (1992).
5. H. W. Deckman and J. H. Dunsmuir, Appl. Phys. Lett. AIP 41, 377 (1982).
6. H. Fang, R. Zeller, and P. J. Stiles, Appl. Phys. Lett. 55, 1433 (1989); H. Fang and P. J. Stiles, Phys. Rev. B 41, 10171 (1990).
7. R. J. Tonucci, B. L. Justus, A. J. Campillo, and C. E. Ford, Science INS 258, 738 (1992).
8. K. Douglas et al., Science 257, 642 (1992); G. Devaud and K. Douglas, J. Vac. Sci. Technol. B 11, 32 (1993).
9. P. Mansky, P. M. Chaikin, and E. L. Thomas, J. Mater. Sci. 30, 1987 (!995); P. Mansky, P. M. Chaikin, M. Shayegan, and L. J. Fetters, Bull. Am. Phys. Soc. 36, 1051 (1991).
10. T. L. Morkved, P. Wiltzius, H. M. Jaeger, D. G. Grier, and T. A. Witten, Appl. Phys. Lett. AIP 64, 422 (1994).
11. F. S. Bates, Science INS 251, 898 (1991).
12. C. S. Hankee, E. L. Thomas, and L. J. Fetters, J. Mater. Sci. INS 23, 1685 (1988).
13. S. H. Anastasiadis, T. P. Russell, S. K. Sajita, and C. F. Majkrzak, Phys. Rev. Lett. 62, 1852 (1989); T. P. Russell, G. Coulon, V. Deline, and P. F. Green, Macromolecules 22, 2581 (1989); T. P. Russell, G. Coulon, V. R. Deline, and D. C. Miller, Macromolecules 22, 4600 (1989).
14. Y. Liu et al., Macromolecules 27, 4000 (1994).
15. S. M. Troian and J. M. Drake (unpublished).
16. K. Amundson, E. Helfand, D. D. Davis, X. Quan, S. S. Patel, and S. D. Smith, Macromolecules 24, 6546 (1991); K. Amundson, E. Helfand, X. Quan, S. D. Hudson, and S. D. Smith, Macromolecules 27, 6559 (1994).
17. T. L. Morkved, M. Liu, H. M. Jaeger, P. Mansky, and T. P. Russell (unpublished).
18. A. M. Mayes, D. G. Walton, G. J. Kellogg, T. P. Russell, and P. Lambooy, Macromolecules 27, 6225 (1994); G. J. Kellogg, D. G. Walton, A. M. Mayes, P. Lambooy, T. P. Russell, P. D. Gallagher, and S. K. Satija, Phys. Rev. Lett. (in press).
19. M. A. van Dijk and R. van den Berg, Macromolecules 28, 6773 (1995).
20. Available from Polysciences, Inc., 400 Valley Road, Warrington, PA, 18976, cat. No. 07298.
21. Ozone Research and Equipment Corporation, 4953 West Missouri Avenue, Phoenix, AZ 85301-6100.
22. P. S. Bailey, Ozonation in Organic Chemistry (Academic, New York, 1978); K. W. Ho, J. Polym. Sci. Part A: Polym. Chem. 24, 2467 (1986).
23. J. S. Lee, A. Hirao, and S. Nakahama, Macromolecules 22, 2602 (1989).
24. D. R. Smith and D. J. Meier, Polymer INS 33, 3777 (1992).
25. C. R. Martin, Science INS 266, 1961 (1994).