Porous silicon multilayer optical waveguides

Thin Solid Films

Volumn 276, Issue 1-2, 1996, Pages 143-146

  Loni, A ^a   Canham, L T ^a   Berger, M G ^b   Arens Fischer, R ^b   Munder, H ^b   Luth, H ^b   Arrand, H F ^c   Benson, T M ^c  

^a DEFENCE SCIENCE AND TECHNOLOGY LABORATORY   (United Kingdom)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

^c UNIVERSITY OF NOTTINGHAM   (United Kingdom)

Author keywords

Electrochemistry; Multilayers; Optical properties; Silicon

Indexed keywords

CURRENT DENSITY; ELECTROCHEMISTRY; MULTILAYERS; OXIDATION; OXIDES; PHOTOLITHOGRAPHY; POROSITY; POROUS SILICON; REFRACTIVE INDEX;

PLANAR WAVEGUIDING;

OPTICAL WAVEGUIDES;

EID: 0030125056     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(95)08075-9     Document Type: Article

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