90nm multi-level-cell Flash memory technology

IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Volumn , Issue , 2005, Pages 197-199

  Pangal, Kiran ^a   Abraham, Chintu ^a   Wang, Michael ^a   Nguyen, Hien ^a   Coulter, Jeffrey ^a   Begley, Tom ^a   Soss, Steve ^a  

^a INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CU INTERCONNECT; SINGLE BIT MEMORY CELL;

COPPER; DIELECTRIC FILMS; LITHOGRAPHY; OPTICAL INTERCONNECTS; OXIDATION; POLYSILICON;

FLASH MEMORY;

EID: 28744447898     PISSN: 1523553X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. Y. Song et al, VLSI Symp. 2003, 7b-2.
2. S. Keeney, IEDM Tech Dig. 2001, 41-44
3. Y.M. Park et al, IEDM Tech. Digest 2001, 711-714