Defect-impurity engineering in implanted silicon

Physics-Uspekhi

Volumn 46, Issue 8, 2003, Pages 789-820

  Chelyadinskii A R ^a   Komarov, F F ^b  

^a BELARUSIAN STATE UNIVERSITY   (Belarus)

^b BELARUSIAN STATE UNIVERSITY   (Belarus)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELDS; IMPURITIES; IONIZATION; REACTION KINETICS; RESIDUAL STRESSES; SILICON;

ELASTIC-STRESS FIELDS; METALLIC IMPURITIES; QUASICHEMICAL REACTIONS;

CRYSTAL DEFECTS;

EID: 33748706167     PISSN: 10637869     EISSN: None     Source Type: Journal    
DOI: 10.1070/PU2003v046n08ABEH001371     Document Type: Review

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