Effects of crystal disorder on the molecular hydrogen formation in silicon

Materials Science and Engineering B: Solid-State Materials for Advanced Technology

Volumn 58, Issue 1, 1999, Pages 13-16

  Kitajima, M ^a   Ishioka, K ^a   Tateishi, S ^b   Nakanoya, K ^b   Fukata, N ^b   Murakami, K ^b   Fujimura, S ^c   Hishita, S ^a   Komatsu, M ^a   Haneda, H ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b UNIVERSITY OF TSUKUBA   (Japan)

^c FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL LATTICES; CRYSTALLINE MATERIALS; HYDROGEN; ION IMPLANTATION; MOLECULAR VIBRATIONS; PHONONS; PLASMA APPLICATIONS; RAMAN SPECTROSCOPY; SECONDARY ION MASS SPECTROMETRY;

OPTICAL PHONONS;

SILICON;

EID: 0344210373     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(98)00266-9     Document Type: Article

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