SCOPUS 정보 검색 플랫폼

Volumn 58, Issue 1, 1999, Pages 24-25

Molecular hydrogen traps within silicon

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; CRYSTALLINE MATERIALS; DIFFUSION IN SOLIDS; FERMI LEVEL; HYDROGEN; INFRARED SPECTROSCOPY; PLASMA APPLICATIONS; RAMAN SPECTROSCOPY;

PLASMA TREATMENT;

SILICON;

EID: 0345504128 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-5107(98)00268-2 Document Type: Article

Times cited : (5)

References (16)

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