Infrared response of oxygen precipitates in silicon: Experimental and simulated spectra

Applied Physics Letters

Volumn 75, Issue 8, 1999, Pages 1131-1133

  Sassella, A ^a   Borghesi, A ^a   Geranzani, P ^b   Borionetti, G ^c  

^a UNIVERSITY OF MILANO BICOCCA   (Italy)

^b MEMC Electronic Materials SpA   (Italy)

^c MEMC Electronic Materials SpA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042916609     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124619     Document Type: Article

References (22)

1. Oxygen in Silicon, edited by F. Shimura (Academic, San Diego, 1994).
2. A. Borghesi, B. Pivac, A. Sassella, and A. Stella, J. Appl. Phys. 77, 4169 (1995).
3. H. Bender and J. Vanhellemont, in Defects Engineering in Semiconductor Growth Processing, and Technology, edited by S. Ashok, J. Chevallier, K. Sumino, and E. Weber (Materials Research Society, Pittsburgh, PA, 1992), p. 15.
4. P. Gaworzewski, E. Hild, F. G. Kirscht, and L. Vecsernyés, Phys. Status Solidi A 85, 133 (1984).
5. A. Baghdadi, W. M. Bullis, M. C. Croakin, Y.-Z. Li, R. I. Scace, R. W. Series, P. Stallhofer, and M. Watanabe, J. Electrochem. Soc. 136, 2015 (1989).
6. A. Sassella, A. Borghesi, and T. Abe, J. Electrochem. Soc. 145, 1715 (1998).
7. H. Bender, Phys. Status Solidi A 86, 245 (1984).
8. W. Bergholz, M. J. Binns, G. R. Booker, J. C. Hutchinson, S. H. Kinder, S. Messoloras, R. C. Newman, R. J. Stewart, and J. G. Wilkes, Philos. Mag. B 59, 499 (1989).
9. S. M. Hu, J. Appl. Phys. 51, 5945 (1980).
10. O. De Gryse, P. Clauws, J. Vanhellemont, and C. Claeys, Mater. Sci. Forum 258-263, 405 (1997).
11. A. Borghesi, B. Pivac, and A. Sassella, Appl. Phys. Lett. 60, 871 (1992).
12. A. Borghesi and A. Sassella, Phys. Rev. B 50, 17756 (1994).
13. A. Borghesi, A. Sassella, and T. Abe, Jpn. J. Appl. Phys., Part 2 34, L1409 (1995).
14. J. A. Stratton, Electromagnetic Theory (Boringhieri, Torino, 1952).
15. P. Grosse, B. Harbecke, B. Heinz, R. Meyer, and M. Offenberg, Appl. Phys. A: Solids Surf. 39, 257 (1986).
16. W. M. Skiff, H. L. Tsai, and R. W. Carpenter, Mater. Res. Soc. Symp. Proc. 59, 241 (1986).
17. A. Borghesi, A. Piagei, A. Sassella, A. Stella, and B. Pivac, Phys. Rev. B 46, 4123 (1992).
18. Handbook of Optical Constants of Solids, edited by D. W. Palik (Academic. Orlando, 1985).
19. P. G. Pai, S. S. Chao, Y. Takagi, and G. Lucovsky, J. Vac. Sci. Technol. A 4, 689 (1986).
20. B. Pivac, A. Borghesi, M. Geddo, A. Sassella, and A. Stella, Appl. Surf. Sci. 63, 245 (1993).
21. W. A. Tiller, S. Hahn, and F. A. Ponce, J. Appl. Phys. 59, 3255 (1986).
22. A. Armigliato and R. Balbone (private communication).