Defect reaction and its application to silicon materials technology

Materials Science and Engineering B: Solid-State Materials for Advanced Technology

Volumn 72, Issue 2, 2000, Pages 67-72

  Sumino, Koji ^a  

^a NIPPON STEEL CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; CRYSTAL DEFECTS; CRYSTAL IMPURITIES; IRON; MORPHOLOGY; NUMERICAL METHODS; OXYGEN; STRENGTHENING (METAL); THERMODYNAMIC STABILITY;

COPPER IMPURITIES; DEFECT REACTION; METALLIC IMPURITIES; OXYGEN IMPURITIES; SILICON IMPURITIES; SILICON MATERIALS TECHNOLOGY; STRUCTURAL DEFECTS;

SILICON WAFERS;

EID: 0033904941     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(99)00495-X     Document Type: Article

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