Silicon wafer technology. Status and overlook at the millennium and a decade beyond

Solid State Phenomena

Volumn 69, Issue , 1999, Pages 1-10

  Mozer, A P ^a  

^a SILTRONIC AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTRONICS; SEMICONDUCTOR DEVICE MANUFACTURE;

SEMICONDUCTOR INDUSTRY;

SILICON WAFERS;

EID: 0032670230     PISSN: 10120394     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.4028/www.scientific.net/ssp.69-70.1     Document Type: Article

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