SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Applied Physics Letters

Volumn 74, Issue 8, 1999, Pages 1141-1143

Effect of ion mass on the evolution of extended defects during annealing of MeV ion-implanted p-type Si

(4) Fatima, S a Wong Leung, J a Fitz Gerald, J a Jagadish, C a

a AUSTRALIAN NATIONAL UNIVERSITY (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000740603 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.123468 Document Type: Article

Times cited : (18)

References (16)

1
- 36449002123
- P. A. Stolk, H. J. Gossmann, D. J. Eaglesham, D. C. Jacobson, J. M. Poate, and H. S. Luftman, Appl. Phys. Lett. 66, 568 (1995).
- (1995) Appl. Phys. Lett. , vol.66 , pp. 568
- Stolk, P.A.¹ Gossmann, H.J.² Eaglesham, D.J.³ Jacobson, D.C.⁴ Poate, J.M.⁵ Luftman, H.S.⁶

2
- 0001062374
- H. J. Gossmann, C. S. Rafferty, H. S. Luftman, F. C. Unterwald, T. Boone, and J. M. Poate, Appl. Phys. Lett. 63, 639 (1993).
- (1993) Appl. Phys. Lett. , vol.63 , pp. 639
- Gossmann, H.J.¹ Rafferty, C.S.² Luftman, H.S.³ Unterwald, F.C.⁴ Boone, T.⁵ Poate, J.M.⁶

3
- 0023860584
- K. S. Jones, S. Prussin, and E. R. Weber, Appl. Phys. A: Solids Surf. 45, 1 (1988).
- (1988) Appl. Phys. A: Solids Surf. , vol.45 , pp. 1
- Jones, K.S.¹ Prussin, S.² Weber, E.R.³

4
- 0030566534
- J. Lalita, N. Keskitalo, A. Hallen, C. Jagadish, and B. G. Svensson, Nucl. Instrum. Methods Phys. Res. B 120, 27 (1996).
- (1996) Nucl. Instrum. Methods Phys. Res. B , vol.120 , pp. 27
- Lalita, J.¹ Keskitalo, N.² Hallen, A.³ Jagadish, C.⁴ Svensson, B.G.⁵

5
- 0026206580
- R. J. Schreutelkamp, J. S. Custer, J. R. Liefting, W. X. Lu, and F. W. Saris, Mater. Sci. Rep. 6, 275 (1991).
- (1991) Mater. Sci. Rep. , vol.6 , pp. 275
- Schreutelkamp, R.J.¹ Custer, J.S.² Liefting, J.R.³ Lu, W.X.⁴ Saris, F.W.⁵

6
- 0000780069
- S. Fatima, J. Wong-Leung, J. Fitz Gerald, and C. Jagadish, Appl. Phys. Lett. 72, 3044 (1998).
- (1998) Appl. Phys. Lett. , vol.72 , pp. 3044
- Fatima, S.¹ Wong-Leung, J.² Fitz Gerald, J.³ Jagadish, C.⁴

7
- 0042477549
- unpublished
- H. J. Hay, FASTRIM is a modified version of TRIM-90 which takes into account the multilayer target (interfaces) problems inherent with TRIM (unpublished).
- FASTRIM Is a Modified Version of TRIM-90 Which Takes into Account the Multilayer Target (Interfaces) Problems Inherent with TRIM
- Hay, H.J.¹

8
- 0003412161
- in edited by J. F. Ziegler Pergamon, New York
- J. F. Ziegler, J. P. Biersack, and U. Littmark, in The Stopping and Range of Ions in Solids, edited by J. F. Ziegler (Pergamon, New York, 1985).
- (1985) The Stopping and Range of Ions in Solids
- Ziegler, J.F.¹ Biersack, J.P.² Littmark, U.³

9
- 0040153542
- P. Omling, E. R. Weber, L. Montelius, H. Alexander, and J. Miche, Phys. Rev. B 32, 6571 (1985).
- (1985) Phys. Rev. B , vol.32 , pp. 6571
- Omling, P.¹ Weber, E.R.² Montelius, L.³ Alexander, H.⁴ Miche, J.⁵

10
- 0000085788
- J. L. Benton, S. Libertino, P. Kringhøj, D. J. Eaglesham, J. M. Poate, and S. Coffa, J. Appl. Phys. 82, 120 (1997).
- (1997) J. Appl. Phys. , vol.82 , pp. 120
- Benton, J.L.¹ Libertino, S.² Kringhøj, P.³ Eaglesham, D.J.⁴ Poate, J.M.⁵ Coffa, S.⁶

11
- 0017241048
- C. A. Ferreira Lima and A. Howie, Philos. Mag. 34, 1057 (1976).
- (1976) Philos. Mag. , vol.34 , pp. 1057
- Ferreira Lima, C.A.¹ Howie, A.²

12
- 0001080862
- S. Libertino, J. L. Benton, D. C. Jacobson, D. J. Eaglesham, J. M. Poate, S. Coffa, P. Kringhøj, P. G. Fuochi, and M. Lavalle, Appl. Phys. Lett. 71, 389 (1997).
- (1997) Appl. Phys. Lett. , vol.71 , pp. 389
- Libertino, S.¹ Benton, J.L.² Jacobson, D.C.³ Eaglesham, D.J.⁴ Poate, J.M.⁵ Coffa, S.⁶ Kringhøj, P.⁷ Fuochi, P.G.⁸ Lavalle, M.⁹

13
- 21544453255
- P. Kringhøj, J. S. Williams, and C. Jagadish, Appl. Phys. Lett. 65, 17 (1994).
- (1994) Appl. Phys. Lett. , vol.65 , pp. 17
- Kringhøj, P.¹ Williams, J.S.² Jagadish, C.³

14
- 0026138906
- M. D. Giles, J. Electrochem. Soc. 138, 1160 (1991).
- (1991) J. Electrochem. Soc. , vol.138 , pp. 1160
- Giles, M.D.¹

15
- 0001138082
- S. B. Herner, H. J. Gossmann, L. P. Pelaz, G. H. Gilmer, M. Jaraiz, D. C. Jacobson, and D. J. Eaglesham, J. Appl. Phys. 83, 6182 (1998).
- (1998) J. Appl. Phys. , vol.83 , pp. 6182
- Herner, S.B.¹ Gossmann, H.J.² Pelaz, L.P.³ Gilmer, G.H.⁴ Jaraiz, M.⁵ Jacobson, D.C.⁶ Eaglesham, D.J.⁷

16
- 0002489142
- M. J. Caturla, T. Diaz de la Rubia, and G. H. Gilmer, Nucl. Instrum. Methods Phys. Res. B 106, 1 (1995).
- (1995) Nucl. Instrum. Methods Phys. Res. B , vol.106 , pp. 1
- Caturla, M.J.¹ Diaz De La Rubia, T.² Gilmer, G.H.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.