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Applied Physics Letters

Volumn 76, Issue 3, 2000, Pages 321-323

Transition from small interstitial clusters to extended {311} defects in ion-implanted Si

(3) Coffa, Salvatore a Libertino, Sebania a Spinella, Corrado a

a CNR IMETEM (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001412514 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.125733 Document Type: Article

Times cited : (88)

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