Interaction of copper with cavities in silicon

Journal of Applied Physics

Volumn 79, Issue 3, 1996, Pages 1337-1350

  Myers, S M ^a   Follstaedt, D M ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001322815     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.361031     Document Type: Article

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