DeleCut: Producing High-Quality SOI Structures by Hydrogen Ion Implantation

Russian Microelectronics

Volumn 31, Issue 4, 2002, Pages 232-237

  Popov, V P ^a   Antonova, I V ^a   Frantsuzov, A A ^a   Safronov, L N ^a   Popov, A I ^a   Naumova, O V ^a   Antonenko, A Kh ^a   Kilanov, D V ^a   Mironova, I V ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0346388415     PISSN: 10637397     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1016335113235     Document Type: Article

References (9)

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